DNA Nanostructure

Self-assembled DNA nanostructure is an attractive template for ultra-high resolution (< 10 nm) and low-cost (< $10s/m2) nanofabrication. DNA nanostructures can be made into both 2D and 3D shapes with a resolution down to ca. 5 nm and size up to micrometer range.

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My research has been focused on the development of new pattern transfer methods for DNA-based nanofabrication. Due to the low chemical and mechanical stability of DNA templates, they are not compatible with most of the pattern transfer methods used in traditional lithography. Our early work discovered that DNA templates could change the amount of molecular catalyst or precursor that can be adsorbed by the substrate, which in turn changes the rate of etching or deposition reactions on the surface. This mechanism of pattern transfer is conceptually very different from that of the traditional lithography, which is based on physical masking. This fundamental research has resulted in a number of novel pattern transfer methods that can produce sub-20 nm resolution patterns on Si, self-assembled monolayers, and polymers.

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Our ongoing work in this area focuses on two directions: (1) Scaling-up the DNA-based nanofabrication to allow patterning of large area substrates. (2) Fabrication of integrated nanoelectronics devices (transistors, memories) using DNA templates.